Sensys Instruments, which was recently acquired by Therma-Wave Inc., is expanding its operations at 3171 Jay St. in Santa Clara. Therma-Wave, a worldwide leader in the development, manufacturer, marketing and service of process control metrology systems used in the manufacture of semiconductors, has leased the entire 13,374-square-foot flex building. Dave Schmidt of Colliers International in San Jose represented the landlord, D&L Real Estate Investments. Tom McGovern of CRESA Partners in San Jose represented Therma-Wave in the transaction.